scoutPPQ is a fully automated system for the complete elemental analysis of total metals in ultrapure chemicals for parts-per-quadrillion (ppq) level analysis.
sub-PPQ Detection Limits (Concentration Mode)
- Suitable for UPW, IPA, TMAH, H2O2, and others
- Removes difficult matricies
- Reduces impact of ICPMS interference
Total Metals Online Analyzer
- Multi-element determination of total metals
- Autocalibration of total metals
- Analyzes all semiconductor grade chemicals
- Up to 40 sampling points
- At up to 300 m in any direction
Ease of Use
- Flexible reporting options including SECS/GEM
- Works with all semiconductor chemicals
- Direct analysis mode for sub-ppt detection limits
- Concentration mode for sub-ppq detection limits
Integrated ICPMS
Workflow Diagram
Example diagram (shown to the right) for remote monitoring of incoming/outgoing chemicals and process chemicals using scoutPPQ.